PRODUCTS

MEBL PLATFORM

Out of the Lab and Into the Fab!

Multi Electron Beam Lithography (MEBL) Systems
for productive, high volume manufacturing

FULLY AUTOMATED

MEBL’s staged vacuum transfer system assures precise, repeatable performance for use in state-of-the-art semiconductor fabs. It assures the high productivity and reliability levels needed for high volume and high growth applications.

E-BEAM PRECISION ON A
FAB WORTHY SYSTEM

E-BEAM PRECISION ON A FAB WORTHY SYSTEM

5-20X higher patterning rate than lab e-beam chambers

100X more precise than optical laser direct write systems
Patented multicolumn e-beam chamber array
Multi-chamber, ultra high vacuum, cluster tool

Up to 1000X more productive than single e-beam systems

COMPACT FOOTPRINT

Efficient use of cleanroom and subfab space using cluster tool. 1/10th the size of leading edge lithography systems while similar throughputs for many direct write applications.

Products

Multibeam’s MEBL Platform is designed to move E-beam direct write lithography “Out-of-the-Lab’ and into the Fab!

Fully automated, the staged vacuum transfer system assures precise, repeatable performance at modern semiconductor fab productivity levels needed for high volume and high growth applications.

E-BEAM PRECISION ON A FAB WORTHY SYSTEM

Multibeam’s patented multicolumn e-beam chamber array:  5-20X higher patterning rate than lab e-beam chambers and 100X more precise than optical laser direct write systems.  

Multiple ultra-high chambers on a cleanroom cluster tool:  Up to 1000X more productive than single e-beam chambers on a single chamber system. 

Compact footprint:  Efficient use of cleanroom and subfab space by use of a cluster tool.  1/10th the size of leading edge lithography systems while similar throughputs for many direct write applications.  

Flexible:  The core chamber has been designed to accommodate 300mm, 200mm and 150mm silicon wafers and can be configured for other wafer sizes, and other substrate types.

MEBL 200

200mm and below wafer processing. Novel high-tech substrates, high-mix, high security, emerging applications, specialty foundries (Tower Semi).

MEBL 300

300mm wafer processing for high volume, unique custom, or high security processing.

Single to Multi-Module

Two or more writing modules, each uniquely configured for node capability, novel applications or clustered for volume manufacturing. Call to speak to a representative today.